MEMS solid state miniature gyros ranges +/- 150 deg/sec to +/-1200 deg/sec and accelerometers ranges +/- 1g to +/-60g. Suitable for aerospace and robotics applications, and general motion monitoring.
Solid state capacitance type tilt sensors with voltage output, ranges +/- 20 and +/-60 degrees, and very high accuracy servo accelerometers for structural monitoring.